Cantilever:
F:330kHzC:42N/m
L:125µm
Applications:
HighAspectRatio(HAR)AFMProbesDescription:
NANOSENSORS™AR10T-NCHAFMtipsaredesignedfornon-contactmodeortappingmodeAFM.ThisprobetypecombineshighoperationstABIlitywithoutstandingsensitivityandfastscanningability.
Formeasurementsonsampleswithsidewallanglesapproaching90°NANOSENSORS™producesspeciallytailoredtips.ThesetipsareFIB(FocusedIonBeam)milledtoachieveahighaspectratioportionbetterthan10:1attheendofthecommonsilicontip.Thissubtractivemethodofproducingthehighaspectrationeedleofferstheadvantageofhighlateralstiffnessandrigidityofthetip.
OnthemodelAR10Tthelast1.5µmofthetiparetilted13°tothecenteraxisofthecantilever.WiththisfeaturethetiltangleofthecantilevercausedbythemountoftheAFMhead(commonly13°)willbecompensated.Now,nearlyverticalsidewallscanbemeasuredofferingasymmetricalscan.
Theprobeoffersuniquefeatures:- lengthofthehighaspectratioportionofthetip>1.5µm
- typicalaspectratioat1.5µmintheorderof12:1(whenviewedfromsideaswellasalongcantileveraxis)
- highaspectratioportionofthetiptilted13°tothecantileversurfacenormal
- excellenttiprADIusofcurvature
- monolithictip
- highlydopedsilicontodissipatestaticcharge
- highmechanicalQ-factorforhighsensitivity