品牌咨询
联系方式
公司地址
苏州工业园区生物纳米园A4#216
联系电话
4000-520-616 / 18915418616
传真号码
0512-67156496
电子邮箱
info@ebiomall.com
公司网址
https://www.ebiomall.com
商品描述
BoilingPoint:-20°
EINECSNumber:214-184-7
MeltingPoint:-150°
MolecularWeight:60.17
AlternativeName:2MS
SpecificGravity:0.68
HMISKey:3-4-1-X
Formula:C2H8Si
TSCA:TSCA
Application:GeneratescubicsiliconcarbidebyplasmaCVD.1
EpitaxialgrowthofcubicsiliconcarbidecarriedoutbytriodeplasmaCVD.2
Reference:1.Hashim,A.etal.SemiconductorElectronics,IEEInt'l.Conf.Proc.2006,646.
2.Yasuiet,K.etal.Appl.Surf.Sci.2000,159,556.
AdditionalProperties:Dipolemoment:0.75debye
?Hcomb:-624kcal/moleCriticaltemperature:125°
?Hform:-23kcal/mole?Hvap:5.5kcal/mole
CVDprecursorforlowkdielectriclayersindamascenemetallizationapplicationsVaporpressure,-80°30mm
