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商品描述
EINECSNumber:237-880-2
MeltingPoint:169-70°dec
MolecularWeight:351.92
SpecificGravity:2.671
HMISKey:2-0-0-X
Formula:C6O6W
TSCA:TSCA
Application:EmployedinMOCVDoftungsten1andtungstennitride2inULSIdevices.
Reference:1.Faltermeier,F.etal.InAdvancedMetallizationforULSIApplications,1992Cale,T.etal.Eds.Mater.Res.Soc.1993.
2.Kelsey,J.etal.J.Vac.Sci.Technol.1999,B17,1101.
AdditionalProperties:?Hform:-227kcal/mole
?Hsub:17.2kcal/moleVaporpressure,67°:1.2torr
